设备概要

  大型液晶面板制造工程用显影液再生系统

  TMAH 浓度 , 阻光液浓度 , 碳酸盐浓度的管理及安定 CD 值

  高再生率可大幅削减成本

保证精度

  TMAH 浓度 : 2.380 ± 0.005wt% 

Features

• Control of the true developer concentration that does not include carbonate and photo-resist, carbonate concentration in Developer

• Real-time monitoring of Developer components by multi-components concentration meter

• Reducing total volume of Developer waste

• Reducing consumption of TMAH and De-Ionized Water for TMAH dilution